한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2001년도 춘계학술대회 논문집
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- Pages.877-880
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- 2001
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- 2005-8446(pISSN)
이송 자벌레로의 압전소자 응용
Application of Piezoceramic Actuator for Inch-Worm
초록
This paper presents the new linear motion device so called "inch-worm" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamics stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Driving input signal is shaped to reduce the residual vibration of inch-worm by LQG controller and cycloid step input. The practical feasibility of inch-worm is also examined by running test.ning test.