한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2001년도 춘계학술대회 논문집
- /
- Pages.560-565
- /
- 2001
- /
- 2005-8446(pISSN)
압전소자를 이용한 AE센서 및 연마공정 감시장치 개발
Development of acoustic emission sensor using piezoelectric elements and monitoring system for polishing process
초록
Recently, machining process monitoring technique based on AE(acoustic emission) signal is used widely and becomes very important technique in machining process for improving the efficiency and the confidence of the systems. In this study, we fabricated a cheap acoustic emission sensor and monitoring system and estimated the properties of them through comparing with commercial AE sensor systems. In addition, we evaluated the performance of the fabricated sensor in polishing process. Futhermore, we are scheduled to develop the multi-point polishing process monitoring system through fabrication of the more AE sensors and complement of the monitoring system.