Micro Power System Development

마이크로 파워 시스템의 개발

  • 박건중 (서울대학교 기계항공공학부) ;
  • 전병선 (서울대학교 기계항공공학부) ;
  • 민홍석 (서울대학교 재료공학부) ;
  • 송성진 (서울대학교 기계항공공학부) ;
  • 민경덕 (서울대학교 기계항공공학부) ;
  • 주영창 (서울대학교 재료공학부)
  • Published : 2001.11.01

Abstract

This paper reports on the development of micro power system under way at Seoul National University. The interdisciplinary tin consists of members with various backgrounds of mechanics and materials. The need for micro power systems is explained, and a turbine under development is described. Design, and fabrication are introduced, and technical challenges in each phase are described. Furthermore, the interaction between the available fabrication methods and design is explained. Design involves use of commercially available codes to analyze flow fields, and fabrication takes advantage of the silicon wafer etching processes used to manufacture semiconductor devices.

Keywords