마이크로 압축성형 공정을 이용한 굴절/회절용 마이크로 광부품 성형

Fabrication of Refractive/Diffractive Micro-Optical Elements Using Micro-Compression Molding

  • 문수동 (연세대학교 대학원 기계공학과) ;
  • 안수호 (연세대학교 대학원 기계공학과) ;
  • 강신일 (연세대학교 기계 전자 공학부)
  • 발행 : 2001.10.01

초록

Micromolding methods such as micro-injection molding and micro-compression molding are most suitable for mass production of plastic micro-optics with low cost. In this study, plastic micro-optical components, such as refractive microlenses and diffractive optical elements(DOEs) with various grating patterns, were fabricated using micro-compression molding process. The mold inserts were made by ultrapricision mechanical machining and silicon etching. A micro compression molding system was designed and developed. Polymer powders were used as molded materials. Various defects found during molding were analyzed and the process was optimized experimentally by controlling the governing process parameters such as histories of mold temperature and compression pressure. Mim lenses of hemispherical shape with $250{\mu}m$ diameter were fabricated. The blazed and 4 stepped DOEs with $24{\mu}m$ pitch and $5{\mu}m$ depth were also fabricated. Optical and geometrical properties of plastic molded parts were tested by interferometric technique.

키워드