Voltage Source Resonant Inverter for Excimer Gas Discharge Load

  • Koudriavtsev Oleg (The Graduate School of Engineering and Science, Power Electronic Systems and Control Engineering Laboratory, Yamaguchi University) ;
  • Nakaoka Mutsuo (The Graduate School of Engineering and Science, Power Electronic Systems and Control Engineering Laboratory, Yamaguchi University)
  • Published : 2001.10.01

Abstract

Silent gas discharge method has been widely applied for ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low-cost power supply for such systems is a task of great impotency. This paper introduces high-frequency inverter type mode power supply designed for ozone generation tube and ultraviolet generation excimer lamp and considerations on this inverter and pulse density modulation control strategy applied in it.

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