대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 하계학술대회 논문집 B
- /
- Pages.798-800
- /
- 2001
Photolithography용 선형 BLDC 전동기의 정밀제어
Precision Control of Linear BLDC Motor for Photolithography
-
전정우
(한국전기연구원 Mechatronics연구그룹)
;
-
강도현
(한국전기연구원 Mechatronics연구그룹)
;
-
김지원
(한국전기연구원 Facts & PQ연구그룹)
;
- 전영환 (한국전기연구원 Facts & PQ연구그룹) ;
-
황돈하
(한국전기연구원 Mechatronics연구그룹)
;
- 박도영 (한국전기연구원 Mechatronics연구그룹) ;
-
김용주
(한국전기연구원 Mechatronics연구그룹)
-
Jeon, J.W.
(Mechatronics Research Group, KERI)
;
-
Kang, D.H.
(Mechatronics Research Group, KERI)
;
-
Kim, J.W.
(Facts & PQ Research Group, KERI)
;
- Jeon, Y.W. (Facts & PQ Research Group, KERI) ;
-
Hwang, D.H.
(Mechatronics Research Group, KERI)
;
- Park, D.Y. (Mechatronics Research Group, KERI) ;
-
Kim, Y.J.
(Mechatronics Research Group, KERI)
- 발행 : 2001.07.18
초록
Precision control technologies are required for photolithography. The linear BLDC motor is used for the stage operations. The stage that is installed in a photolithography device is basically controlled in three directions(x, y, z axes). This paper presents precision control technologies of the linear BLDC motor in one direction by computer simulations. A position control system with linear BLDC motor is now being tested.
키워드