Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2001.07b
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- Pages.798-800
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- 2001
Precision Control of Linear BLDC Motor for Photolithography
Photolithography용 선형 BLDC 전동기의 정밀제어
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Jeon, J.W.
(Mechatronics Research Group, KERI) ;
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Kang, D.H.
(Mechatronics Research Group, KERI) ;
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Kim, J.W.
(Facts & PQ Research Group, KERI) ;
- Jeon, Y.W. (Facts & PQ Research Group, KERI) ;
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Hwang, D.H.
(Mechatronics Research Group, KERI) ;
- Park, D.Y. (Mechatronics Research Group, KERI) ;
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Kim, Y.J.
(Mechatronics Research Group, KERI)
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전정우
(한국전기연구원 Mechatronics연구그룹) ;
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강도현
(한국전기연구원 Mechatronics연구그룹) ;
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김지원
(한국전기연구원 Facts & PQ연구그룹) ;
- 전영환 (한국전기연구원 Facts & PQ연구그룹) ;
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황돈하
(한국전기연구원 Mechatronics연구그룹) ;
- 박도영 (한국전기연구원 Mechatronics연구그룹) ;
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김용주
(한국전기연구원 Mechatronics연구그룹)
- Published : 2001.07.18
Abstract
Precision control technologies are required for photolithography. The linear BLDC motor is used for the stage operations. The stage that is installed in a photolithography device is basically controlled in three directions(x, y, z axes). This paper presents precision control technologies of the linear BLDC motor in one direction by computer simulations. A position control system with linear BLDC motor is now being tested.
Keywords