Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2001.07c
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- Pages.1921-1923
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- 2001
Fabrication of a novel micromachined measurement device for temperature distribution measurement in the microchannel
마이크로채널 내의 온도 분포 측정을 위한 미소 측정 구조물의 제작
- Park, Ho-Joon (Samsung Advanced Institute of Technology, MEMS lab.) ;
- Lim, Geun-Bae (Samsung Advanced Institute of Technology, MEMS lab.) ;
- Son, Sang-Young (Samsung Advanced Institute of Technology, MEMS lab.) ;
- Song, In-Seob (Samsung Advanced Institute of Technology, MEMS lab.) ;
- Pak, James-Jung-Ho (Korea Univ. Microsystems lab.)
- 박호준 (삼성종합기술원 MEMS lab.) ;
- 임근배 (삼성종합기술원 MEMS lab.) ;
- 손상영 (삼성종합기술원 MEMS lab.) ;
- 송인섭 (삼성종합기술원 MEMS lab.) ;
- 박정호 (고려대학교 마이크로시스템 연구실)
- Published : 2001.07.18
Abstract
In this work, an array of resistance temperature detector(RTD) was fabricated inside the microchannel in order to investigate in-situ flow characteristics. A rectangular straight microchannel, integrated with RTD's for temperature sensing and a heat source for generating the temperature gradient along the channel. were fabricated with the dimension of
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