대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

정전형 MEMS 검출기의 새로운 Offset 보상 방법

New Offset-compensation Technique for Capacitive MEMS-Sensor

  • 민동기 (MEMS Lab., 삼성종합기술원) ;
  • 전종업 (MEMS Lab., 삼성종합기술원)
  • Min, Dong-Ki (MEMS Lab., Samsung Advanced Institute of Technology) ;
  • Jeon, Jong-Up (MEMS Lab., Samsung Advanced Institute of Technology)
  • 발행 : 2001.07.18
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

An offset problem caused by the static parasitic capacitors is analyzed and then some techniques to reduce their effect on the capacitive position sensor are presented. Also new offset compensation technique is proposed that by adjusting the magnitudes of the modulating signals independently, the charge imbalance between electrodes caused by the parasitic capacitors is eliminated without sensor gain variation. Simulation results are given to validate the proposed compensation technique.

키워드