Fabrication of electromagnetically actuated Al mirror with staple joint structure

스테이플 조인트를 이용한 전자력 구동 Al 미러의 제작

  • Lim, Tae-Sun (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 임태선 (서울대학교 전기 컴퓨터 공학부) ;
  • 김용권 (서울대학교 전기 컴퓨터 공학부)
  • Published : 2001.07.18

Abstract

In this study, we fabricated Al mirror driven by electromagnetic force. Because the mirror has Ni staple joint, it reduces the deflection angle of torsion spring for the maximum deflection of mirror. Therefore the magnetic field for maximum deflection can be reduced, By additional electrostatic force, the deflection angle of mirror plate can be increased to $90^{\circ}$. The fabricated mirror is actuated by electromagnetic force of a simple solenoid. The maximum deflection angle by magnetic field is about $86^{\circ}$ with $1.2{\times}10^4$ A/m.

Keywords