대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 하계학술대회 논문집 C
- /
- Pages.1881-1883
- /
- 2001
LIGA process를 이용한 micro CPL(Capillary Pumped Loop)제작
manufacturing micro CPL (Capillary Pumped Loop)by using LIGA process
- Cho, Jin-Woo (Korea Electronics Technology Institute) ;
- Jung, Suk-Won (Korea Electronics Technology Institute) ;
- Park, Joon-Shik (Korea Electronics Technology Institute) ;
- Park, Sun-Seob (Korea Electronics Technology Institute)
- 발행 : 2001.07.18
초록
We manufactured a micro CPL by LlGA process, a new conceptual ultra-fine and precise forming method, using X-ray lithography process. We fabricated a BN X-ray mask having properties of good X-ray transmittance and large mechanical strength. Micro CPL was manufactured by dividing into an upper plate and a low plate. Each of plates was bonded by Ag paste screen printing. The upper plate was fabricated on glass wafer to observe flow and phase transformation of cooling solution. The lower plate was manufactured by Cu electroplating for good heat transmission. Precision of inner Parts, micro pin and micro channel, of manufactured micro CPL is under
키워드