대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2001년도 하계학술대회 논문집 C
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- Pages.1518-1520
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- 2001
MO 배면전극의 제조조건이 CIGS 박막의 광특성에 미치는 영향
Optical Properties of CIGS Films as Deposition Conditions of Mo Back Contact
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김석기
(한국에너지기술연구원) ;
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이정철
(한국에너지기술연구원) ;
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강기환
(한국에너지기술연구원) ;
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윤경훈
(한국에너지기술연구원) ;
- 박이준 (한국에너지기술연구원) ;
-
송진수
(한국에너지기술연구원) ;
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한상옥
(충남대학교)
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Kim, S.K.
(Korea Institute of Energy Research) ;
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Lee, J.L.
(Korea Institute of Energy Research) ;
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Kang, K.H.
(Korea Institute of Energy Research) ;
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Yoon, K.H.
(Korea Institute of Energy Research) ;
- Park, I.J. (Korea Institute of Energy Research) ;
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Song, J.
(Korea Institute of Energy Research) ;
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Han, S.O.
(ChungNam National University)
- 발행 : 2001.07.18
초록
Bi-layer Mo films were deposited on sodalime glass substrates using DC magnetron sputtering. As the gas pressure and power density, the resistivity varied from
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