Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A study on the improvement of crystallinity and surface roughness of polycrystalline diamond films deposited by MPCVD method

MPCVD 방법에 의해 증착된 다결정 다이아몬드 박막의 결정성 및 표면 거칠기 향상에 관한 연구

  • Shin, Wan-Chul (Dept. of Electrical Engineering, Hanyang University) ;
  • Seo, Soo-Hyung (Center for Electronic Materials and Components', Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electrical Engineering, Hanyang University)
  • 신완철 (한양대학교 전자전기제어계측공학과) ;
  • 서수형 (한양대학교 전자재료 및 부품연구센터) ;
  • 박진석 (한양대학교 전자전기제어계측공학과)
  • Published : 2001.07.18
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Abstract

Polycrystalline diamond films are deposited by using a microwave plama CVC system, where the bias-enhanced nucleation (BEN) method is employed. Effects of the varying microwave power, the surface treatment by hydrogen plasma, and the cyclic hydrogen etching during deposition on the crystallinity as well as on the surface roughness of deposited films are examined by Raman spectroscopy, SEM, and AFM. A novel method for achieving a smoother diamond surface is also suggested through the indirect wafer bonding and back-side polishing.

Keywords