한국가스학회:학술대회논문집

The Korean Institute of GAS (한국가스학회)
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The methods for detoxification of toxic gases in semiconductor process

반도체 공정용 독성 가스 제독 방법

  • Kim Younggu (Institute of Gas Safety Technology, Korea Gas Safety Corporation) ;
  • No O-Seon (Institute of Gas Safety Technology, Korea Gas Safety Corporation) ;
  • Kim Ji-Yun (Institute of Gas Safety Technology, Korea Gas Safety Corporation)
  • 김영구 (한국가스안전공사 가스안전시험연구원) ;
  • 노오선 (한국가스안전공사 가스안전시험연구원) ;
  • 김지윤 (한국가스안전공사 가스안전시험연구원)
  • Published : 2001.10.01
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