Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2000.10a
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- Pages.192.1-192
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- 2000
A Study on the stabilization of residual stress in SiOF thin films deoposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
ECRPECVD법으로 증착한 SiOF 박막의 잔류응력 안정화에 관한 연구
- Published : 2000.10.20
Abstract
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