Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2000.10a
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- Pages.191.1-191
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- 2000
Effect of Film Density on the Electrical Properties of ITO Thin Films Deposited by R.F. Magnetron Reactive Sputtering
R.F. Magnetron Reactive Sputtering법으로 증착한 ITO 박막의 밀도가 전기적성질에 미치는 영향
Abstract
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