Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2000.10a
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- Pages.79.1-79
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- 2000
Crystallization of a-SiC:H thin films deposited by PECVD and annealing effect
PECVD법에 의해 증착된 a-SiC:H 박막의 결정화 및 annealing 효과
- Published : 2000.10.20
Abstract
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