The improvement of Cu metal film adhesion on polymer substrate by the low-power High-frequency ion thruster

  • Cho, Jung (Department of Ceramic Engineering Yonsei University) ;
  • Kralkina, Elena (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Yoon, Ki-Hyun (Department of Ceramic Engineering Yonsei University) ;
  • Koh, Seok-Keun (Thin Film Technology Research Center, Korea Institute of Science and Technology)
  • 발행 : 2000.04.21