한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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- Pages.231-234
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- 2000
Ni-Grain Size Dependent Growth of Vertically Aligned Carbon Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition and Field Emission Properties
- Choi, Young-Chul (Department of Semiconductor Science and Technology, and Semiconductor Physics Research Center, Jeonbuk National University) ;
- Jeon, Seong-Ran (Department of Semiconductor Science and Technology, and Semiconductor Physics Research Center, Jeonbuk National University) ;
- Park, Young-Soo (Department of Semiconductor Science and Technology, and Semiconductor Physics Research Center, Jeonbuk National University) ;
- Bae, Dong-Jae (Department of Semiconductor Science and Technology, and Semiconductor Physics Research Center, Jeonbuk National University) ;
- Lee, Young-Hee (Department of Semiconductor Science and Technology, and Semiconductor Physics Research Center, Jeonbuk National University) ;
- Lee, Byung-Soo (Division of Advanced Materials Engineering, Jeonbuk National University) ;
- Park, Gyeong-Su (Analytical Engineering Laboratory, Samsung Advanced Institute of Technology) ;
- Choi, Won-Bong (Display Laboratory, Samsung Advanced Institute of Technology) ;
- Lee, Nae-Sung (Display Laboratory, Samsung Advanced Institute of Technology) ;
- Kim, Jong-Min (Display Laboratory, Samsung Advanced Institute of Technology)
- 발행 : 2000.01.13
초록
Vertically aligned carbon nanotubes were synthesized on Ni-coated Si substrates using microwave plasma-enhanced chemical vapor deposition. The grain size of Ni thin films was varied with the RF power density during the RF magnetron sputtering process. It was found that the diameter, growth rate, and density of carbon nanotubes could be controlled systematically by the grain size of Ni thin films. With decreasing the grain size of Ni thin films, the diameter of the nanotubes decreased, whereas the growth rate and density increased. High-resolution transmission electron microscope images clearly demonstrated synthesized nanotubes to be multiwalled. The number of graphitized wall decreased with decreasing the diameter. Field emission properties will be further presented.
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