한국정보디스플레이학회:학술대회논문집
- 2000.01a
- /
- Pages.109-110
- /
- 2000
MgO Sputtering in the AC-PDPs with Monte Carlo Methods
- Gill, Doh-Hyun (Charged Particle Beam and Plasma Laboratory, Department of Electrophysics /PDP Research Center, Kwangwoon University) ;
- Kim, Hyun-Sook (Charged Particle Beam and Plasma Laboratory, Department of Electrophysics /PDP Research Center, Kwangwoon University) ;
- Joh, Dae-Guen (Charged Particle Beam and Plasma Laboratory, Department of Electrophysics /PDP Research Center, Kwangwoon University) ;
- Kim, Young-Guon (Charged Particle Beam and Plasma Laboratory, Department of Electrophysics /PDP Research Center, Kwangwoon University) ;
- Choi, Eun-Ha (Charged Particle Beam and Plasma Laboratory, Department of Electrophysics /PDP Research Center, Kwangwoon University) ;
- Cho, Guang-Sup (Charged Particle Beam and Plasma Laboratory, Department of Electrophysics /PDP Research Center, Kwangwoon University)
- Published : 2000.01.13
Abstract
Sputtering yield of MgO film in the AC-PDPs has been calculated by Monte Carlo simulation of ion scattering. In the ion energy range less than 50 eV, the sputtering yield is 4
Keywords