한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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- Pages.85-87
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- 2000
A Study of Etch Characteristics of ITO Thin Film using the Plasma Diagnostic Tools
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Park, J.Y.
(Department of Materials Engineering, Sungkyunkwan University) ;
- Lee, D.H. (Department of Materials Engineering, Sungkyunkwan University) ;
- Jeong, C.H. (Department of Materials Engineering, Sungkyunkwan University) ;
- Kim, H.S. (Department of Materials Engineering, Sungkyunkwan University) ;
- Kwon, K.H. (Department of Electronic Engineering, Hanseo University) ;
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Yeom, G.Y.
(Department of Materials Engineering, Sungkyunkwan University)
- 발행 : 2000.01.13
초록
In this study, high-density plasma etching characteristics of ITO(indium tin oxide) films used for transparent electrodes in display devices have been investigated. The etch characteristics of ITO as a function of
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