한국정보디스플레이학회:학술대회논문집
- 2000.01a
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- Pages.81-83
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- 2000
Indium Tin Oxide(ITO) Thin Film Deposition on Polyethylene Terephthalate(PET) Using Ion Beam Assisted Deposition(IBAD)
- Bae, J.W. (Dept. of Materials Engineering, Sungkyunkwan Univ.) ;
- Kim, H.J. (Dept. of Materials Engineering, Sungkyunkwan Univ.) ;
- Kim, J.S. (Dept. of Materials Engineering, Sungkyunkwan Univ.) ;
- Lee, Y.H. (Dept. of Materials Engineering, Sungkyunkwan Univ.) ;
- Lee, N.E. (Dept. of Materials Engineering, Sungkyunkwan Univ.) ;
- Yeom, G.Y. (Dept. of Materials Engineering, Sungkyunkwan Univ.)
- Published : 2000.01.13
Abstract
Tin-doped indium oxide(ITO) thin films were deposited on polyethylene terephthalate(PET) at room temperature by oxygen ion beam assisted evaporator system and the effects of oxygen gas flow rate on the properties of room temperature ITO thin films were investigated. Plasma characteristics of the ion gun such as oxygen ions and atomic oxygen radicals as a function of oxygen flow rate were investigated using optical emission spectroscopy(OES). Faraday cup also used to measure oxygen ion density. The increase of oxygen flow rate to the ion gun generally increase the optical transmittance of the deposited ITO up to 6sccm of
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