대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2000년도 춘계학술대회논문집B
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- Pages.108-112
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- 2000
상변화를 이용한 Micro-actuator에 대한 해석
Analysis on Phase-Change Based Micro-actuator
초록
This paper presents a mathematical model and simulation of the micro-actuator based on thermally induced liquid-vapor phase-change in a partially-filled closed cavity. The volume expansion by liquid-vapor Phase change can generate considerable forces and displacement