Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2000.04b
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- Pages.108-112
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- 2000
Analysis on Phase-Change Based Micro-actuator
상변화를 이용한 Micro-actuator에 대한 해석
Abstract
This paper presents a mathematical model and simulation of the micro-actuator based on thermally induced liquid-vapor phase-change in a partially-filled closed cavity. The volume expansion by liquid-vapor Phase change can generate considerable forces and displacement