한국초전도학회:학술대회논문집

The Korean Superconductivity Society (한국초전도학회)
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New fabrication methods of step-edge Josephson junctions on SrTiO$_3$, MgO, LaAlO$_3$ single crystal substrates for YBa$_2$Cu$_3$O$_7$ thin films by using ion milling technique

  • Moon, Sunk-Yung (Korea Research Institute of Standards and Science, Korea University) ;
  • Ahn, Jong-Rok (Korea Research Institute of Standards and Science, Korea University) ;
  • Hwang, Yun-Seok (Korea Research Institute of Standards and Science, Korea University) ;
  • Lee, Soon-Gul (Korea University) ;
  • Choi, Hee-Seok (Korea Research Institute of Standards and Science) ;
  • Kim, Jin-Tae (Korea Research Institute of Standards and Science)
  • Published : 2000.08.16
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Abstract

Two methods have been investigated to fabricate good quality step-edge Josephson junctions on STO, MgO, and LAO single crystal substrates. One is the annealing of substrates at 1050$^{\circ}$C in 1 atmospheric oxygen after Ar-ion milling. The other is the cleaning of step-edge by using Ar ion milling. The step-edge is characterized with atomic force microscope (AFM) images. And YBCO thin films are deposited by using pulsed laser. The I-V properties of step-edge junctions are characterized. The yield rate of step-edge junction is increased by new fabrication methods.

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