한국초전도학회:학술대회논문집

한국초전도학회 (The Korean Superconductivity Society)
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배향화된 금속기관에서 산화물막의 제조와 분석

Fabrication and characterization of metal oxide films on textured metal substrates

  • 최은철 (한국과학기술원 재료공학과 전자 및 광학재료 실험실) ;
  • 홍인기 (한국과학기술원 재료공학과 전자 및 광학재료 실험실) ;
  • 이창호 (한국과학기술원 재료공학과 전자 및 광학재료 실험실) ;
  • 성태현 (한국전력연구원) ;
  • 노광수 (한국과학기술원 재료공학과 전자 및 광학재료 실험실)
  • Choi, Eun-Chul (Electronic and Optical Materials Laboratory, Dep. of Mat. Sci. & Eng., Korea Advanced Institute of Science and Technology) ;
  • Hong, In-Ki (Electronic and Optical Materials Laboratory, Dep. of Mat. Sci. & Eng., Korea Advanced Institute of Science and Technology) ;
  • Lee, Chang-Ho (Electronic and Optical Materials Laboratory, Dep. of Mat. Sci. & Eng., Korea Advanced Institute of Science and Technology) ;
  • Sung, Tae-Hyun (Korea Electric Power Research Institute) ;
  • No, Kwang-Soo (Electronic and Optical Materials Laboratory, Dep. of Mat. Sci. & Eng., Korea Advanced Institute of Science and Technology)
  • 발행 : 2000.08.16
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초록

Recently, metal oxide films such as MgO or ZrO$_2$ have been studied as buffer layers to fabricate the superconductor with preferred orientation and as diffusion barriers to prevent the reaction between superconductor and metal substrate. In this research, we focused fabrication and characterization of MgO and ZrO$_2$ films on textured metal substrates. We fabricated MgO and ZrO$_2$ films on the Ni metal sheets by sol-gel dipping method. The microstrcures of the films were investigated by SEM and AES analyses. The films were coated with different cycles and dryed at 400$^{\circ}$C and 500$^{\circ}$C . The final films were heat-treated at 700$^{\circ}$C, 800$^{\circ}$C, and 1000$^{\circ}$C, in air atmosphere. We investigated the alignment of MgO and ZrO$_2$ films on Ni metal sheets by XRD and pole figure. The grain growth of metal oxide films was improved by the increase of the drying temperature and annealing temperature. The grain growth was increased with the annealing temperature. The alignment of metal oxide films depended on the thickness.

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