A Study on the Electron Energy Distribution Function in $SF_6+Ar$ Mixtures Gas used by MCS-BE Algorithm

$SF_6+Ar$ 혼합기체의 MCS-BE 알고리즘에 의한 전자에너지 분포함수

  • Published : 2000.07.07

Abstract

A Study on the electron energy distribution function in $SF_6+Ar$ mixtures gas used by MCS-BE algorithm, the electron swam parameters in the 0.5% and 0.2% $SF_6+Ar$ mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. The electron energy distribution function has been analysed in $SF_6$ gas and $SF_6+Ar$ mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

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