초정밀 Stage용 선형 BLDC 전동기 설계

Linear BLDC motor design for a ultra-precision stage

Recently, the demands of the ultra-precision stage system, such as wafer stepper stages for photolithography, are increasing in the field of manufacturing and test equipment. Since the mechanical elements which convert rotational motion into translational introduce backlash and elasticity in the system, better performance of the drive could be achieved by the linear BLDC motor with appropriate servo control. The analytical design and the FEM analysis about linear BLDC motor is described in this paper. The performance of the servo-drive system will be evaluated through the comparison of results between the designed data and the measured data in the future.