Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2000.11c
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- Pages.411-412
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- 2000
Study on the Luminescence of Si Nanocrystallites on Si Substrate Fabricated by Changing the Wavelength of Pulsed laser deposition
펄스레이저 증착법의 레이저 파장변환에 의한 실리콘 나노결정의 발광특성 연구
- Kim, Jong-Hoon (Department of Electronic and Electrical Engineering, Yonsei Univ.) ;
- Bae, Sang-Hyuck (Department of Electronic and Electrical Engineering, Yonsei Univ.) ;
- Lee, Sang-Yeol (Department of Electronic and Electrical Engineering, Yonsei Univ.)
- Published : 2000.11.25
Abstract
Si nanocrstallites on p-tyre (100) Si substrate have been fabricated by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355, 532 and 1064 nm. The base vacuum in the chamber was down to
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