한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2000년도 제11회 정기총회 및 00년 동계학술발표회 논문집
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- Pages.192-193
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- 2000
Thermal Reflow법에 의한 마이크로렌즈의 제작 및 그 특성
Fabrication and Characteristics of Microlens using Thermal Reflow Method
초록
We studied the characteristics and fabricated the plano-convex refractive microlenses using the thermal reflow method. The exposed resist was resolved in a standard developing process. The remaining resist of circle pattern was melted in an oven 12
키워드