근접장을 이용한 고밀도 광 메모리에 관한 연구 : 광 픽업을 위한 미세 개구 행렬의 제작과 시험

Enhanced density of optical data storage using near-field concept : Fabrication and test of nanometric aperture array

  • J. Cha (Department of Physics and Center for Near-field Atom-photon Technology, Seoul National University) ;
  • Park, J. H. (Department of Physics and Center for Near-field Atom-photon Technology, Seoul National Universit) ;
  • Kim, Myong R. (Department of Physics and Center for Near-field Atom-photon Technology, Seoul National University, LG Cooperate Institute of Technolog) ;
  • W. Jhe (Department of Physics and Center for Near-field Atom-photon Technology, Seoul National University)
  • 발행 : 2000.02.01

초록

We have tried to enhance the density of the near-field optical memory and to improve the recording/readout speed. The current optical memory has the limitation in both density and speed. This barrier due to the far-field nature can be overcome by the use of the near-field$^{(1)}$ . The optical data storage density can be increased by reducing the size of the nanometric aperture where the near-field is obtained. To fabricate the aperture in precise dimension, we applied the orientation-dependent / anisotropic etching property of crystal Si often employed in the field of MEMS$^{(2)}$ . And so we fabricated the 10$\times$10 aperture array. This array will be also the indispensable part for speeding up. One will see the possibility of the multi-tracking pickup in the phase changing type memory through this array$^{(3)}$ . This aperture array will be expected to write the bit-mark whose size is about 100nm. We will show the recent result obtained. (omitted)

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