A New Inspection Method of PDP Electrode Pattern Defects

  • Kim, Taehong (Microinspection, Inc., Ansan Technopark Supporting Center of Hanyang University) ;
  • Sunkyu Yang (Microinspection, Inc., Ansan Technopark Supporting Center of Hanyang University) ;
  • Tak Eun (Microinspection, Inc., Ansan Technopark Supporting Center of Hanyang University) ;
  • Park, Sehwa (Semi & Medical device Development Team, KITECH) ;
  • Ilhong Suh (School of Electrical and Computer Engineering, Hanyang U.)
  • 발행 : 2000.10.01

초록

The display module of PDP consists of a pair of fine electrode patterned panels. For example, in case of 42" PDP, thousands of electrode patterns should be placed on panel, where length, width, and height of each pattern m one meter, 50${\mu}{\textrm}{m}$, and 30${\mu}{\textrm}{m}$ respectively. And pitch between patterns is around 200${\mu}{\textrm}{m}$. Electrode patterns are frequently damaged during the production process, and thus might be broken. These breakage will result in open-circuited electrical characteristic of a pattern and/or open-circuited electrical characteristic between patterns. Therefore, inspection of pattern defects is the inevitable process to improve production yield rate of the panel. In this paper, we first review several types of PDP pattern defects which affects yield-rate of PDP. And, problems of inspecting such pattern defects by a typical inspection method is addressed. Then, a novel inspection method is proposed to overcome the difficulties, where some new components and the algorithm to detect the electrode defects are explored.ored.

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