제어로봇시스템학회:학술대회논문집
- 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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- Pages.447-447
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- 2000
Object-oriented model for Generic Equipment Model
- Jung, Myong-Soon (Department of Elec. and Comp., Kangwon National University) ;
- Ahn, Gye-Jin (Department of Elec. and Comp., Kangwon National University) ;
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Park, Hong-Seong
(Department of Elec. and Comp., Kangwon National University)
- 발행 : 2000.10.01
초록
This paper proposes an Object-oriented model for Generic Equipment Model(GEM) which is applied to semiconductor processing Equipment. A proposed implementation model for GEM consists of three modules : a module to convert SECS-II message and a module to transmit messages between GEM and a physical equipment. The proposed Object-oriented model for GEM has advantages in reuse and user management from the point of view of development program. Especially, this paper proposes a GEM agent COM, which is a base of GEM, transmits messages and events among modules. This Object-oriented model is analysed and developed by using UML.
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