온도제어용 자동동조 PID 제어기 설계와 RTP에의 적용

Development of auto-tuning PID controller for Temperature Control systems and Its Application to Rapid Thermal Processor

An auto-tuning PID controller which is adequate for temperature control is developed based on relay-control and pole-placement Using the critical frequency which is obtained from relay-control parameters of assumed model are identified. Pole/zero-placement PID controller is designed for the identified model. The desired pole/zeros are determined so that the closed-loop has overshoot free step response. The developed auto-tuning PID controller was successfully applied to the temperature control of RTP.