A Study on the Optimal Algorithm to Find the Minimum Numbers of Sharing Resources in Semiconductor Production Systems

반도체 생산 시스템에서의 최소 공유 장비를 구하는 최적 알고리즘에 관한 연구

Since FMS(Flexible Manufacturing System) such as semiconductor production systems have the characteristic that each device has to be commonly used in several stages, it is difficult to find an optimal solution. In this paper, we proposed the new algorithm which can get the optimal ratio of sharing resources. We will implement the proposed algorithm to semiconductor production systems. We introduce the optimal algorithm, which is modeled and analyzed by ExSpect, a petri net based simulation tool. When there exist conflicts of sharing resources, the scheduling method is adopted, which gives a priority to the most preceded process. The suggested algorithm can be used not only in semiconductor production systems but also in various FMS.