Proceedings of the Korean Society of Laser Processing Conference (한국레이저가공학회:학술대회논문집)

Korean Society of Laser Processing (한국레이저가공학회)
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Phase explosion and particle generation phenomena during high power nanosecond laser ablation of silicon

나노초 레이저 어블레이션에 의한 실리콘의 폭발적 보일링 현상 및 입자발생

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  • J. H. Yoo (University of California at Berkeley) ;
  • R. Greif (University of California at Berkeley) ;
  • R. E. Russo (Lawrence Berkeley National Laboratory)
  • 정성호 (광주과학기술원 기전공학과) ;
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  • Published : 2000.11.01
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