Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2000.11a
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- Pages.23-24
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- 2000
A STUDY ON THE ELECTRICAL PROPERTIES OF TIOxNy FILMS WITH CONTROLLED OXYGEN PARTIAL PRESSURE
- Jung, Min J. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University) ;
- Nam, Kyung H. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University) ;
- Jung, Yun M. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University) ;
- Boo, Jin H. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University) ;
- Han, Jeon G. (Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University)
- Published : 2000.11.01
Abstract
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