Characterization and optimization of $SnO_2(Sb_2O_3,{\;}5wt% doping):O_2$ films by DC-magnetron sputtering from a metallic tin target

  • Lee, I. (Sungkyunkwan University) ;
  • Park, K.J. (Agency for Technology and Standards) ;
  • S.H. Shin (Agency for Technology and Standards) ;
  • J.H. Shin (Agency for Technology and Standards) ;
  • Lee, J. H. (Agency for Technology and Standards) ;
  • J.S. Yi (Sungkyunkwan University)
  • 발행 : 2000.05.01