회절 격자를 이용한 레이저 엔코더의 광 신호처리

Optical Signal Processing of Laser Encoder Using Diffraction Grating

Position-determining capacity is a very important condition in equipments for manufacturing semi-conductor or various instruments to measure physical displacement quantities of a moving object in submicron such as a distance of movement, direction, etc. and the accuracy of total system is influenced by detecting accuracy of these equipments. Therefore in this paper we have optically made up laser linear encoder based on optical diffraction principle to measure these displacement quantities and have processed optical signal using hardware-setup. In consequence we had acquired displacement for movement of scale using a diffraction grating by the accuracy of 0.5${\mu}{\textrm}{m}$ and had digitalized moving quantities of scale.