대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2000년도 추계종합학술대회 논문집(1)
- /
- Pages.489-492
- /
- 2000
시간 영역 유한 차분법(FDTD)을 이용한 마이크로파 대역의 압전 박막 공진기 해석
Finite Difference Time Domain Analysis for Film Bulk Acoustic Wave Resonator used in Microwave Region
초록
Film Bulk Acoustic Wave Resonator(FBAR) used in microwave region was analyzed with Finite Difference Time-Domain Methods(FDTD) in this paper. FBAR have been analyzed with one dimensional Mason model analysis or Finite Element methods(FEM), but the first couldn't analyze effect of area variation and spurious characteristics, the second had difficulty in element separation because of thin electrode. So in this paper FBAR was analyzed by Finite Difference Time-Domain Methods and it's results were transformed to frequency domain using Discrete Fourier Transform.
키워드