Finite Difference Time Domain Analysis for Film Bulk Acoustic Wave Resonator used in Microwave Region

시간 영역 유한 차분법(FDTD)을 이용한 마이크로파 대역의 압전 박막 공진기 해석

Film Bulk Acoustic Wave Resonator(FBAR) used in microwave region was analyzed with Finite Difference Time-Domain Methods(FDTD) in this paper. FBAR have been analyzed with one dimensional Mason model analysis or Finite Element methods(FEM), but the first couldn't analyze effect of area variation and spurious characteristics, the second had difficulty in element separation because of thin electrode. So in this paper FBAR was analyzed by Finite Difference Time-Domain Methods and it's results were transformed to frequency domain using Discrete Fourier Transform.