A Block Disassembly Technique for Equivalent Circuit Extraction of Mask Layouts

마스크 레이아웃의 등가 회로 추출을 위한 블록 분할 기법

In this paper, we describe an automated extraction program that transforms a mask layout into an approximated equivalent circuit information suitable for circuit simulation, and that extract the geometric parameters of stacked MOSFETs and the distributed RCs of layout blocks. To extract equivalent circuit from mask layout, we propose new block disassembly technique capable of accurate computations of distributed RCs at branch point, using vectorized edges which represent the outline of an individual polygon.