한국결정학회:학술대회논문집 (Proceedings of the Korea Crystallographic Association Conference)
- 한국결정학회 2000년도 추계 학술연구발표회
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- Pages.20-20
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- 2000
Low temperature epitaxial growth of 4H-SiC thin films by chemical vapor deposition using bis-trimethylsilylmethane precursor
- Jeong, Jae-Kyeong (School of Materials Science and Engineering, Seoul National University) ;
- Na, Hoon-Joo (School of Materials Science and Engineering, Seoul National University) ;
- Um, Myung-Yoon (School of Materials Science and Engineering, Seoul National University) ;
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Kim, Bum-Seok
(School of Materials Science and Engineering, Seoul National University)
;
- Kim, Hyeong-Joon (School of Materials Science and Engineering, Seoul National University)
- 발행 : 2000.11.01