한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

$RuO_2$박막을 이용한 박막 슈퍼캐패시터의 제작 및 분석

Fabrication and charaterization of $RuO_2$based thin film supercapacitor

  • 임재홍 (연세대학교 세라믹공학과) ;
  • 최두진 (연세대학교 세라믹공학과) ;
  • 전은정 (한국과학기술원 박막기술연구센터) ;
  • 남성철 (한국과학기술원 전지·연료전지센터) ;
  • 조원일 (한국과학기술원 전지·연료전지센터) ;
  • 윤영수 (한국과학기술원 박막기술연구센터)
  • 발행 : 2000.07.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

All solid-state thin film supercapacitor(TFSC) based on $RuO_2$ electrode was fabricated. Ruthenium oxide$(RuO_2)$ thin film was deposited on Pt/Ti/Si subsrate by d.c. magnetron sputtering. LiPON(lithium phosphorus oxynitride) thin film were deposited by r.f. reactive sputtering. X-ray diffraction patterns of $RuO_2$ and LiPON films revealed that crystal structures of both films were amorphous. To decrease resistivity of $RuO_2$ thin film, $RuO_2$ thin film was deposited with $H_2O$ vapor. In order to decide the maximum ionic conductivity, the LiPON films were prepared by various sputtering condition. The maximum ionic conductivity was $9.5\times{10}^7S/cm$. A charge-discharge measurements showed the capacity of $3\times{10-2}\;F/cm^2-\mu{m}$ for the as-fabricated TFSC. The discharging efficiency was decreased after 500 cycles by 40 %.

키워드