한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

고성능 NdFeB 수직 박막자석의 자기적 특성

Magnetic properties of high performance NdFeB perpendicular thin film

  • 김만중 (한국표준과학연구원 전자기표준부 자기그룹) ;
  • 양재호 (충남대학교 금속공학과) ;
  • 김윤배 (한국표준과학연구원 전자기표준부 자기그룹) ;
  • 김택기 (충남대학교 금속공학과)
  • 발행 : 2000.07.01
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초록

Anistropic [Ta/NdFeB/Ta] thin film was sputtered on heated Si substrate by Nd$\_$17/Fe$\_$74/B$\_$9/ target. The grain size of the films increased according to the increase of substrate temperature, and the film deposited at 650$^{\circ}C$ showed optimum coercivity. 4$\pi$M$\_$r/, $\_$i/H$\_$c/ and (BH)$\_$max/ measured perpendicular to the film plane of thin film deposited at 650$^{\circ}C$ are 12.3 kG, 9.9 kOe and 37 MGOe, respectivly.

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