한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 하계학술대회 논문집
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- Pages.663-666
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- 2000
아르곤 이온 레이저를 이용한 CU의 직접 쓰기 기술
Laser dissect writing from copper(II) formate using Ar+ laser
초록
Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)