한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 하계학술대회 논문집
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- Pages.536-539
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- 2000
스퍼터 퇴적 $WO_3$ 막에 대한 열처리효과
Effects of Annealing on the Characteristics of the Sputtered $WO_3$ Film
초록
The effects of annealing on the electrical and structural characteristics for the rf sputter deposited WO