Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.07a
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- Pages.5-8
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- 2000
Measurement of excited species in discharges using Laser Absorption spectroscopy
Abstract
The population density of excited species in dc, rf and laser ablation plume plasmas has been measured using laser absorption spectroscopy. It was shown that, when the plasma was modulated by on and off with, the sensitivity and signal to noise (S/N) ratio became high. For example, the atomic O(3
Keywords
- plasma discharge;
- laser ablation plume;
- plasma modulation laser absorption spectroscopy (PMLAS);
- classical laser absorption spectroscopy(CLAS)