Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2000.11a
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- Pages.156-156
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- 2000
Dielectric and Leakage Current Characteristics of $ Al_2O_3$ Thin Films with Variation of the Reactive Sputtering Condition
반응성 스퍼터링 조건에 따른$ Al_2O_3$ 박막의 유전특성 및 누설전류 특성
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