Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2000.11a
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- Pages.59-59
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- 2000
Low Temperature Deposition of Polycrystalline Silicon Films by Hot Wire Chemical Vapor Deposition
Hot Wire CVD를 이용한 다결정 실리콘 박막의 저온 증착
Abstract
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